Aniston's longtime pal Courteney Cox served as maid of honor, while Theroux's buddy Scott Campbell served as best man at the nuptials, which took place at the couple's Bel Air mansion.
Campbell, who is married to actress Lake Bell, is a tattoo artist who has inked the groom a number of times.
The intimate backyard wedding was attended by 75 guests including Aniston and Cox's Friends costar Lisa Kudrow, Chelsea Handler, Jason Bateman, Emily Blunt and John Krasinski, Ellen DeGeneres and Portia de Rossi, Will Arnett, Tobey Maguire and Jennifer Meyer, and Jimmy Kimmel.
Sia performed "Chandelier" after the couple exchanged rings designed by pal Jennifer Meyer and the celebration lasted till 3 a.m., when Cox was the last guest to leave.
Just hours later the newlyweds were spotted boarding a private plane for their honeymoon in Bora Bora.
Reporting by MIA McNIECE