The actor's remains were cremated, and the family scattered his ashes in San Francisco Bay, not far from his home, PEOPLE confirms.
The Oscar-winning actor committed suicide in his home in Tiburon, California. He is survived by his wife, Susan Schneider, and his three children, Zac, 31, Cody, 22, and Zelda, 25.
Schneider revealed in a statement last week that her late husband was suffering from the early stages of Parkinson's disease.
Williams also struggled with addiction and depression throughout his career, even checking himself into rehab earlier this summer in an effort to "fine-tune and focus on his continued commitment" to sobriety, which his wife said was "intact" at the time of his death.
Although Williams's fans were unable to attend the intimate funeral, many of his admirers have extended their condolences by placing fan-made shrines at some of his most famous film locations. The executive producer of the Emmys also confirmed they are planning a public tribute to the beloved comedian to air during the Aug. 25 awards show.
Reporting by SUSAN YOUNG